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COMAT 2006 >
Please use this identifier to cite or link to this item:
http://hdl.handle.net/123456789/1028
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| Title: | NUMERICAL ESTIMATION OF LOAD CAPACITY OF THIN MICROFILTER-PLATES |
| Authors: | KOVACS, Adam |
| Keywords: | perforated thin plate
MEMS
load-capacity |
| Issue Date: | Oct-2006 |
| Publisher: | Transilvania University Press of Braşov |
| Citation: | GOOGLE SCHOLAR |
| Series/Report no.: | COMAT 2006;1-7 |
| Abstract: | Load capacity, i.e. maximum bursting pressure of square-form, very thin perforated silicon-nitride microfilter-plate has been estimated with the help of finite element simulations. Large deflection analysis has been performed to determine a mathematical relationship between maximum normal stress arisen at the boundary and the normal stress at the middle point. For the latter stress a verified analytical estimate can also be given. Numerical simulations show that the number of perforations and the width of closed frame have no effect on the load capacity, if the perforation rate is constant and the number of perforations is not too small |
| URI: | http://hdl.handle.net/123456789/1028 |
| ISBN: | 973-635-823-2 |
| Appears in Collections: | COMAT 2006
COMAT 2006
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